APA (7th ed.) Citation

Zhang, Z., Ren, J., Liu, Y., & Liu, J. (2025). Numerical Simulation-Based Study of Controlled Particle Deposition Technology for Wafer Surfaces. MDPI AG.

Chicago Style (17th ed.) Citation

Zhang, Ziheng, Jun Ren, Yue Liu, and Junjie Liu. Numerical Simulation-Based Study of Controlled Particle Deposition Technology for Wafer Surfaces. MDPI AG, 2025.

MLA (9th ed.) Citation

Zhang, Ziheng, et al. Numerical Simulation-Based Study of Controlled Particle Deposition Technology for Wafer Surfaces. MDPI AG, 2025.