Klimovich, I. M., Kuleshov, V. N., Zaikou, V. A., Burmakou, A. P., Komarov, F. F., & Ludchik, O. R. (2015). GAS FLOW CONTROL SYSTEM IN REACTIVE MAGNETRON SPUTTERING TECHNOLOGY. Belarusian National Technical University.
Chicago Style (17th ed.) CitationKlimovich, I. M., V. N. Kuleshov, V. A. Zaikou, A. P. Burmakou, F. F. Komarov, and O. R. Ludchik. GAS FLOW CONTROL SYSTEM IN REACTIVE MAGNETRON SPUTTERING TECHNOLOGY. Belarusian National Technical University, 2015.
MLA (9th ed.) CitationKlimovich, I. M., et al. GAS FLOW CONTROL SYSTEM IN REACTIVE MAGNETRON SPUTTERING TECHNOLOGY. Belarusian National Technical University, 2015.
Warning: These citations may not always be 100% accurate.