HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE
The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bea...
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| Format: | Article |
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Czech Technical University in Prague
2020-06-01
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| Series: | Acta Polytechnica CTU Proceedings |
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| Online Access: | https://ojs.cvut.cz/ojs/index.php/APP/article/view/6687 |
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| author | František Lofaj Margita Kabátová |
| author_facet | František Lofaj Margita Kabátová |
| author_sort | František Lofaj |
| collection | DOAJ |
| description | The effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bearing steel, Al2024 aluminum alloy and (111) Si wafer. Although no clear influence of the substrate type on hardness and indentation modulus of the coatings at different acetylene and hydrogen additions was observed, when both measured properties were combined in HITEIT ratio, significant shift of HIT/EIT ratio dependencies obtained on Al alloy vs. steel and Si wafer substrates occurred. Thus, the effect of substrate type on the measurementlevaluation was confirmed. |
| format | Article |
| id | doaj-art-d8b823fbfa2b4ea1b703a90501d13d5c |
| institution | Matheson Library |
| issn | 2336-5382 |
| language | English |
| publishDate | 2020-06-01 |
| publisher | Czech Technical University in Prague |
| record_format | Article |
| series | Acta Polytechnica CTU Proceedings |
| spelling | doaj-art-d8b823fbfa2b4ea1b703a90501d13d5c2025-08-02T20:45:03ZengCzech Technical University in PragueActa Polytechnica CTU Proceedings2336-53822020-06-01270626610.14311/APP.2020.27.00625217HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPEFrantišek Lofaj0Margita Kabátová1Slovak Academy of Sciences, Institute of Materials Research, Watsonova 47, 040 01 Košice, SlovakiaSlovak Academy of Sciences, Institute of Materials Research, Watsonova 47, 040 01 Košice, SlovakiaThe effects of substrate on the measurement of hardness (and indentation modulus) - penetration depth profiles were investigated on hybrid PVD-PECVD W-C:H coatings made with the additions of C2H2 or CH4 using High Power Impulse Magnetron Sputtering (HiPIMS) method. The substrates involved 100Cr6 bearing steel, Al2024 aluminum alloy and (111) Si wafer. Although no clear influence of the substrate type on hardness and indentation modulus of the coatings at different acetylene and hydrogen additions was observed, when both measured properties were combined in HITEIT ratio, significant shift of HIT/EIT ratio dependencies obtained on Al alloy vs. steel and Si wafer substrates occurred. Thus, the effect of substrate type on the measurementlevaluation was confirmed.https://ojs.cvut.cz/ojs/index.php/APP/article/view/6687hardness, indentation modulus, substrate effect, w-c:h coating |
| spellingShingle | František Lofaj Margita Kabátová HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE Acta Polytechnica CTU Proceedings hardness, indentation modulus, substrate effect, w-c:h coating |
| title | HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE |
| title_full | HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE |
| title_fullStr | HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE |
| title_full_unstemmed | HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE |
| title_short | HARDNESS OF HYBRID PVD-PECVD W-C:H COATINGS VS. SUBSTRATE TYPE |
| title_sort | hardness of hybrid pvd pecvd w c h coatings vs substrate type |
| topic | hardness, indentation modulus, substrate effect, w-c:h coating |
| url | https://ojs.cvut.cz/ojs/index.php/APP/article/view/6687 |
| work_keys_str_mv | AT frantiseklofaj hardnessofhybridpvdpecvdwchcoatingsvssubstratetype AT margitakabatova hardnessofhybridpvdpecvdwchcoatingsvssubstratetype |