Influence of annealing on structure, phase and electrophysical properties of vanadium oxide films

Influence of annealing on structure, phase and electrophysical properties of vanadium oxide films

The aim of this work was to study the effect of the parameters of deposition process and subsequent annealing on the properties of vanadium oxide VOx films deposited by the pulsed reactive magnetron sputtering of a V target in an Ar/O2 gas  mixture.  The  dependences  of  the  structure,  phase,  te...

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Bibliographic Details
Main Authors: T. D. Nguen, A. I. Zanko, D. A. Golosov, S. M. Zavadski, S. N. Melnikov, V. V. Kolos, T. Q. To
Format: Article
Language:Russian
Published: Educational institution «Belarusian State University of Informatics and Radioelectronics» 2021-06-01
Series:Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:
microbolometer
vanadium oxide
thin films
reactive magnetron sputtering
annealing
structure
phase composition
electrical properties
Online Access:https://doklady.bsuir.by/jour/article/view/3072
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