FMPOD: A Novel Focus Metric Based on Polynomial Decomposition for Infrared Microscopy

FMPOD: A Novel Focus Metric Based on Polynomial Decomposition for Infrared Microscopy

This paper proposes an innovative autofocus method to ensure the image of an integrated circuit is correctly in focus under an infrared microscope. It discusses the difficulties inherent to the optical system and explores several inefficient methods used for natural scenes. It will also present a Fo...

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Bibliographic Details
Main Authors: Raphael Abele, Redouane El Moubtahij, Daniele Fronte, Pierre-Yvan Liardet, Jean-Luc Damoiseaux, Jean-Marc Boi, Djamal Merad
Format: Article
Language:English
Published: IEEE 2019-01-01
Series:IEEE Photonics Journal
Subjects:
Infrared imaging
Microscopy
Focusing
Focus criterion
Image quality
Image decomposition
Online Access:https://ieeexplore.ieee.org/document/8832225/
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Summary:This paper proposes an innovative autofocus method to ensure the image of an integrated circuit is correctly in focus under an infrared microscope. It discusses the difficulties inherent to the optical system and explores several inefficient methods used for natural scenes. It will also present a Focus Metric based on POlynomial Decomposition (FMPOD) adapted to our context. This approach relies on analyzing the projection of images on an orthonormal polynomial basis. Its robustness is tested using different magnifying lenses in addition to multiple distortions. In conclusion, we will demonstrate how this novel approach outperforms existing methods related to our work environment.
ISSN:1943-0655

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