Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal Multilayers

In the field of microelectronic device technology, the continuous miniaturization of components to nanoscale dimensions highlights the critical importance of thermal transport at metal/metal interfaces. In metallic materials, heat is transported by both electrons and phonons, leading to complex none...

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Main Authors: Donghao Li, Zhongyin Zhang, Ziyang Wang, Gen Li, Jing Zhou, Jie Zhu, Dawei Tang
Format: Article
Language:English
Published: American Association for the Advancement of Science (AAAS) 2025-01-01
Series:Advanced Devices & Instrumentation
Online Access:https://spj.science.org/doi/10.34133/adi.0104
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author Donghao Li
Zhongyin Zhang
Ziyang Wang
Gen Li
Jing Zhou
Jie Zhu
Dawei Tang
author_facet Donghao Li
Zhongyin Zhang
Ziyang Wang
Gen Li
Jing Zhou
Jie Zhu
Dawei Tang
author_sort Donghao Li
collection DOAJ
description In the field of microelectronic device technology, the continuous miniaturization of components to nanoscale dimensions highlights the critical importance of thermal transport at metal/metal interfaces. In metallic materials, heat is transported by both electrons and phonons, leading to complex nonequilibrium coupled heat transfer processes, particularly on nanometer spatial and ultrashort temporal scales. However, conventional experimental characterizations of interface thermal conductance (ITC) often consider only equilibrium heat transport. This study compared ITC measurements at metal/metal interfaces using time-domain thermoreflectance (TDTR) under equilibrium and nonequilibrium conditions, modeled by Fourier’s law and the two-temperature model, respectively. The nanoscale Au/Cr multilayer samples were grown on various substrates, including sapphire, silicon, and silicon dioxide. These experiment results revealed that nonequilibrium ITC at the Au/Cr interface closely matched the predicted value of 6 GW m−2 K−1 by the electronic diffuse mismatch model, which captures ultrafast thermal behavior within the first few picoseconds following femtosecond laser heating. In contrast, equilibrium ITC values were an order of magnitude lower and exhibited significant substrate dependence. The study analyzed the physical differences between these 2 measurement approaches and demonstrated the superior accuracy and reduced substrate influence of nonequilibrium TDTR measurements for metal/metal multilayer structures.
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publishDate 2025-01-01
publisher American Association for the Advancement of Science (AAAS)
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spelling doaj-art-b718b3888d9d40de81e4d5c104c6eb912025-07-02T08:00:20ZengAmerican Association for the Advancement of Science (AAAS)Advanced Devices & Instrumentation2767-97132025-01-01610.34133/adi.0104Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal MultilayersDonghao Li0Zhongyin Zhang1Ziyang Wang2Gen Li3Jing Zhou4Jie Zhu5Dawei Tang6Key Laboratory of Ocean Energy Utilization and Energy Conservation of Ministry of Education, Dalian University of Technology, Dalian, Liaoning 116023, P. R. China.School of Microelectronics, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, P. R. China.Key Laboratory of Ocean Energy Utilization and Energy Conservation of Ministry of Education, Dalian University of Technology, Dalian, Liaoning 116023, P. R. China.Key Laboratory of Ocean Energy Utilization and Energy Conservation of Ministry of Education, Dalian University of Technology, Dalian, Liaoning 116023, P. R. China.School of Microelectronics, Northwestern Polytechnical University, Xi’an, Shaanxi 710072, P. R. China.Key Laboratory of Ocean Energy Utilization and Energy Conservation of Ministry of Education, Dalian University of Technology, Dalian, Liaoning 116023, P. R. China.Key Laboratory of Ocean Energy Utilization and Energy Conservation of Ministry of Education, Dalian University of Technology, Dalian, Liaoning 116023, P. R. China.In the field of microelectronic device technology, the continuous miniaturization of components to nanoscale dimensions highlights the critical importance of thermal transport at metal/metal interfaces. In metallic materials, heat is transported by both electrons and phonons, leading to complex nonequilibrium coupled heat transfer processes, particularly on nanometer spatial and ultrashort temporal scales. However, conventional experimental characterizations of interface thermal conductance (ITC) often consider only equilibrium heat transport. This study compared ITC measurements at metal/metal interfaces using time-domain thermoreflectance (TDTR) under equilibrium and nonequilibrium conditions, modeled by Fourier’s law and the two-temperature model, respectively. The nanoscale Au/Cr multilayer samples were grown on various substrates, including sapphire, silicon, and silicon dioxide. These experiment results revealed that nonequilibrium ITC at the Au/Cr interface closely matched the predicted value of 6 GW m−2 K−1 by the electronic diffuse mismatch model, which captures ultrafast thermal behavior within the first few picoseconds following femtosecond laser heating. In contrast, equilibrium ITC values were an order of magnitude lower and exhibited significant substrate dependence. The study analyzed the physical differences between these 2 measurement approaches and demonstrated the superior accuracy and reduced substrate influence of nonequilibrium TDTR measurements for metal/metal multilayer structures.https://spj.science.org/doi/10.34133/adi.0104
spellingShingle Donghao Li
Zhongyin Zhang
Ziyang Wang
Gen Li
Jing Zhou
Jie Zhu
Dawei Tang
Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal Multilayers
Advanced Devices & Instrumentation
title Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal Multilayers
title_full Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal Multilayers
title_fullStr Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal Multilayers
title_full_unstemmed Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal Multilayers
title_short Interface Thermal Conductance of Nonequilibrium Thermal Transport across Nanoscale Metal Multilayers
title_sort interface thermal conductance of nonequilibrium thermal transport across nanoscale metal multilayers
url https://spj.science.org/doi/10.34133/adi.0104
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