Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing

A Silicon waveguide incorporating a vertical slot filled with Al<sup>&#x002B;3</sup> doped ZnO is proposed for gas sensing. The effect of different device parameters, namely, slot-height, slot-width, and Si-width on two key optical features related to sensing, that is, difference in...

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Main Authors: Ritapa Bhattacharjee, N. T. Kejalakshmy, B. M. Azizur Rahman
Format: Article
Language:English
Published: IEEE 2018-01-01
Series:IEEE Photonics Journal
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Online Access:https://ieeexplore.ieee.org/document/8399488/
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author Ritapa Bhattacharjee
N. T. Kejalakshmy
B. M. Azizur Rahman
author_facet Ritapa Bhattacharjee
N. T. Kejalakshmy
B. M. Azizur Rahman
author_sort Ritapa Bhattacharjee
collection DOAJ
description A Silicon waveguide incorporating a vertical slot filled with Al<sup>&#x002B;3</sup> doped ZnO is proposed for gas sensing. The effect of different device parameters, namely, slot-height, slot-width, and Si-width on two key optical features related to sensing, that is, difference in effective index and differential modal loss, before and after the exposure to gas are investigated using a fully-vectoral finite element method. The optimized sensor with a slot height of 400&#x00A0;nm, slot width of 100 nm and Si width of 65&#x00A0;nm yields the effective index difference of &#x223C;0.285 and differential loss &#x223C;4.35 dB&#x002F;&#x03BC;m, indicating a viable device for gas sensing applications. Detailed numerical analyses also reveal that, at some structural parameters, two anticrossing modes appear which can significantly alter the device performances and, thus, should be avoided.
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publishDate 2018-01-01
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spelling doaj-art-a8a7a32b36cc471b82bcc49973e7f1ab2025-07-01T23:38:30ZengIEEEIEEE Photonics Journal1943-06552018-01-0110411010.1109/JPHOT.2018.28493838399488Design and Optimization of an Al Doped ZnO in Si-Slot for Gas SensingRitapa Bhattacharjee0https://orcid.org/0000-0002-8225-0964N. T. Kejalakshmy1B. M. Azizur Rahman2https://orcid.org/0000-0001-6384-0961Department of Electrical and Electronic Engineering, School of Mathematics, Computer Science & Engineering, City, University of London, London, United KingdomDepartment of Electrical and Electronic Engineering, School of Mathematics, Computer Science & Engineering, City, University of London, London, United KingdomDepartment of Electrical and Electronic Engineering, School of Mathematics, Computer Science & Engineering, City, University of London, London, United KingdomA Silicon waveguide incorporating a vertical slot filled with Al<sup>&#x002B;3</sup> doped ZnO is proposed for gas sensing. The effect of different device parameters, namely, slot-height, slot-width, and Si-width on two key optical features related to sensing, that is, difference in effective index and differential modal loss, before and after the exposure to gas are investigated using a fully-vectoral finite element method. The optimized sensor with a slot height of 400&#x00A0;nm, slot width of 100 nm and Si width of 65&#x00A0;nm yields the effective index difference of &#x223C;0.285 and differential loss &#x223C;4.35 dB&#x002F;&#x03BC;m, indicating a viable device for gas sensing applications. Detailed numerical analyses also reveal that, at some structural parameters, two anticrossing modes appear which can significantly alter the device performances and, thus, should be avoided.https://ieeexplore.ieee.org/document/8399488/Slot waveguidesensors.
spellingShingle Ritapa Bhattacharjee
N. T. Kejalakshmy
B. M. Azizur Rahman
Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing
IEEE Photonics Journal
Slot waveguide
sensors.
title Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing
title_full Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing
title_fullStr Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing
title_full_unstemmed Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing
title_short Design and Optimization of an Al Doped ZnO in Si-Slot for Gas Sensing
title_sort design and optimization of an al doped zno in si slot for gas sensing
topic Slot waveguide
sensors.
url https://ieeexplore.ieee.org/document/8399488/
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AT ntkejalakshmy designandoptimizationofanaldopedznoinsislotforgassensing
AT bmazizurrahman designandoptimizationofanaldopedznoinsislotforgassensing