Three-dimensional measurement enabled by single-layer all-in-one transmitting-receipting optical metasystem
Optical three-dimensional (3D) measurement is a critical tool in micro-nano manufacturing, the automotive industry, and medical technology due to its nondestructive nature, high precision, and sensitivity. However, passive light field system still requires a refractive primary lens to collect light...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institue of Optics and Electronics, Chinese Academy of Sciences
2025-06-01
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| Series: | Opto-Electronic Advances |
| Subjects: | |
| Online Access: | https://www.oejournal.org/article/doi/10.29026/oea.2025.240299 |
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| Summary: | Optical three-dimensional (3D) measurement is a critical tool in micro-nano manufacturing, the automotive industry, and medical technology due to its nondestructive nature, high precision, and sensitivity. However, passive light field system still requires a refractive primary lens to collect light of the scene, and structured light can not work well with the highly refractive object. Meta-optics, known for being lightweight, compact, and easily integrable, has enabled advancements in passive metalens-array light fields and active structured light techniques. Here, we propose and experimentally validate a novel 3D measurement metasystem. It features a transmitting metasurface generating chromatic line focuses as depth markers and a symmetrically arranged receiving metasurface collecting depth-dependent spectral responses. A lightweight, physically interpretable algorithm processes these data to yield high-precision depth information efficiently. Experiments on metallic and wafer materials demonstrate a depth accuracy of ±20 µm and lateral accuracy of ±10 µm. This single-layer optical metasystem, characterized by simplicity, micro-level accuracy, easy installation and scalability, shows potential for diverse applications, including process control, surface morphology analysis, and production measurement. |
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| ISSN: | 2096-4579 |