Characterization of ion track-etched conical nanopores in thermal and PECVD SiO2 using small angle X-ray scattering

Conical nanopores in amorphous SiO2 thin films fabricated using the ion track etching technique show promising potential for filtration, sensing, and nanofluidic applications. The characterization of the pore morphology and size distribution, along with its dependence on the material properties and...

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Bibliografiske detaljer
Main Authors: Shankar Dutt, Rudradeep Chakraborty, Christian Notthoff, Pablo Mota-Santiago, Christina Trautmann, Patrick Kluth
Format: Article
Sprog:engelsk
Udgivet: Beilstein-Institut 2025-06-01
Serier:Beilstein Journal of Nanotechnology
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Online adgang:https://doi.org/10.3762/bjnano.16.68
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