Nazarenko, M. V. (2022). Comparison of magnetron sputtering systems for high-rate deposition of thick copper layers for microelectronic applications. MIREA - Russian Technological University.
Chicago Style (17th ed.) CitationNazarenko, M. V. Comparison of Magnetron Sputtering Systems for High-rate Deposition of Thick Copper Layers for Microelectronic Applications. MIREA - Russian Technological University, 2022.
MLA (9th ed.) CitationNazarenko, M. V. Comparison of Magnetron Sputtering Systems for High-rate Deposition of Thick Copper Layers for Microelectronic Applications. MIREA - Russian Technological University, 2022.
Warning: These citations may not always be 100% accurate.