Plasma Spectroscopy Diagnostics of V2O5 at a Variable of Operating Power and Pressure With Radio Frequency Magnetron Sputtering.
In this paper, we investigate the basic characteristics of "magnetron sputtering plasma" using the target V2O5. The "magnetron sputtering plasma" is produced using "radio frequency (RF)" power supply and Argon gas. The intensity of the light emission from atoms and radi...
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Main Author: | salman et al. |
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Format: | Article |
Language: | English |
Published: |
University of Baghdad, College of Science for Women
2019-03-01
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Series: | مجلة بغداد للعلوم |
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Online Access: | http://bsj.uobaghdad.edu.iq/index.php/BSJ/article/view/3235 |
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