Influence of Deposition Pressure on Component Composition and Properties of Barium Strontium Titanate Thin Films

Influence of Deposition Pressure on Component Composition and Properties of Barium Strontium Titanate Thin Films

Influence of deposition pressure on the properties of ferroelectric barium strontium titanate thin films obtained by RF magnetron sputtering has been investigated. It has been shown that the deposition pressure affects the component composition of the films as the spatial zone of atomic particle the...

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Bibliographic Details
Main Authors: A. G. Altynnikov, A. G. Gagarin, M. V. Zlygostov, A. Y. Popov, S. V. Razumov, A. V. Tumarkin
Format: Article
Language:Russian
Published: Saint Petersburg Electrotechnical University "LETI" 2016-12-01
Series:Известия высших учебных заведений России: Радиоэлектроника
Subjects:
rf magnetron sputtering
thin films
barium strontium titanate (bst)
deposition pressure
composition
rutherford backscattering (rbs)
thermalization distances
atomic-force microscopy
Online Access:https://re.eltech.ru/jour/article/view/147
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Summary:Influence of deposition pressure on the properties of ferroelectric barium strontium titanate thin films obtained by RF magnetron sputtering has been investigated. It has been shown that the deposition pressure affects the component composition of the films as the spatial zone of atomic particle thermalization changes significantly. Influence of deposition pressure on growth rate and, hence, on film thickness has been studied.
ISSN:1993-8985
2658-4794

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