A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature
A compact fiber optic Fabry-Perot (F-P) sensor for simultaneous acoustic and temperature measurement has been proposed in the research. The sensor consists of silicon-glass-silicon sandwich structure by anodic bonding. The air F-P cavity with a circular hole and slots utilizes the deformation of the...
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| Format: | Article |
| Language: | English |
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IEEE
2019-01-01
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| Series: | IEEE Photonics Journal |
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| Online Access: | https://ieeexplore.ieee.org/document/8873583/ |
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| author | Xiaoying Liu Junfeng Jiang Shuang Wang Kun Liu Lei Xue Xue Wang Zhe Ma Xuezhi Zhang Yongning Zhang Tiegen Liu |
| author_facet | Xiaoying Liu Junfeng Jiang Shuang Wang Kun Liu Lei Xue Xue Wang Zhe Ma Xuezhi Zhang Yongning Zhang Tiegen Liu |
| author_sort | Xiaoying Liu |
| collection | DOAJ |
| description | A compact fiber optic Fabry-Perot (F-P) sensor for simultaneous acoustic and temperature measurement has been proposed in the research. The sensor consists of silicon-glass-silicon sandwich structure by anodic bonding. The air F-P cavity with a circular hole and slots utilizes the deformation of the silicon membrane to realize acoustic measurement, and the silicon F-P cavity utilizes the temperature sensitivity of the refractive index of silicon to realize temperature measurement. The acoustic signal and temperature information could be recovered by acoustic and temperature demodulation method, respectively. The experimental results demonstrate that the sensor has a signal-to-noise ratio (SNR) of 53 dB and the acoustic sensitivity of 4.65 mV/Pa at 21 kHz, and the temperature sensitivity of 123.10 nm/°C at 20 °C∼120 °C. The proposed fiber optic F-P sensor has great potential for simultaneous acoustic and temperature measurement in aviation, due to its compact structure, mass production and immunity to electromagnetic interference. |
| format | Article |
| id | doaj-art-7ad59907c78d49c8af6f9948a47dd2f8 |
| institution | Matheson Library |
| issn | 1943-0655 |
| language | English |
| publishDate | 2019-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Photonics Journal |
| spelling | doaj-art-7ad59907c78d49c8af6f9948a47dd2f82025-07-01T23:46:29ZengIEEEIEEE Photonics Journal1943-06552019-01-0111611010.1109/JPHOT.2019.29480458873583A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and TemperatureXiaoying Liu0https://orcid.org/0000-0002-4947-0244Junfeng Jiang1https://orcid.org/0000-0003-0393-8451Shuang Wang2https://orcid.org/0000-0002-9809-4062Kun Liu3https://orcid.org/0000-0003-2460-6851Lei Xue4Xue Wang5Zhe Ma6https://orcid.org/0000-0001-9249-2214Xuezhi Zhang7https://orcid.org/0000-0001-9241-251XYongning Zhang8https://orcid.org/0000-0001-5450-0789Tiegen Liu9https://orcid.org/0000-0003-4141-6961School of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaSchool of Precision Instrument and Optoelectronics Engineering, Tianjin University, Tianjin, ChinaA compact fiber optic Fabry-Perot (F-P) sensor for simultaneous acoustic and temperature measurement has been proposed in the research. The sensor consists of silicon-glass-silicon sandwich structure by anodic bonding. The air F-P cavity with a circular hole and slots utilizes the deformation of the silicon membrane to realize acoustic measurement, and the silicon F-P cavity utilizes the temperature sensitivity of the refractive index of silicon to realize temperature measurement. The acoustic signal and temperature information could be recovered by acoustic and temperature demodulation method, respectively. The experimental results demonstrate that the sensor has a signal-to-noise ratio (SNR) of 53 dB and the acoustic sensitivity of 4.65 mV/Pa at 21 kHz, and the temperature sensitivity of 123.10 nm/°C at 20 °C∼120 °C. The proposed fiber optic F-P sensor has great potential for simultaneous acoustic and temperature measurement in aviation, due to its compact structure, mass production and immunity to electromagnetic interference.https://ieeexplore.ieee.org/document/8873583/Fiber optic sensorFabry-Perot sensoracoustictemperature. |
| spellingShingle | Xiaoying Liu Junfeng Jiang Shuang Wang Kun Liu Lei Xue Xue Wang Zhe Ma Xuezhi Zhang Yongning Zhang Tiegen Liu A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature IEEE Photonics Journal Fiber optic sensor Fabry-Perot sensor acoustic temperature. |
| title | A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature |
| title_full | A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature |
| title_fullStr | A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature |
| title_full_unstemmed | A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature |
| title_short | A Compact Fiber Optic Fabry–Perot Sensor for Simultaneous Measurement of Acoustic and Temperature |
| title_sort | compact fiber optic fabry x2013 perot sensor for simultaneous measurement of acoustic and temperature |
| topic | Fiber optic sensor Fabry-Perot sensor acoustic temperature. |
| url | https://ieeexplore.ieee.org/document/8873583/ |
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