Sapphire-Based Dammann Gratings for UV Beam Splitting
We report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, t...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7605520/ |
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| Summary: | We report sapphire-based Dammann gratings (DGs) for ultraviolet (UV) beam (266 nm) splitting, which is fabricated via femtosecond laser direct writing assisted with subsequent wet etching. By applying 400-nm-wavelength laser processing followed by wet etching, smooth surface morphology, together with well-tailored geometry, was obtained. These DGs generated 2 × 2, 3 × 3, 4 × 4, and 5 × 5 spot sources in the fan-out as designed and exhibited diffraction efficiency of 59.26%, 39.53%, 44.68%, and 55.37%, respectively, comparable with theoretical values. Such sapphire-based DGs show great potential in UV beam shaping, UV beam splitting, and laser parallel microprocessing. |
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| ISSN: | 1943-0655 |