Electroacoustic Analysis of a Controlled Damping Planar CMOS-MEMS Electrodynamic Microphone
This paper gives a detailed electroacoustic study of a new generation of monolithic CMOS micromachined electrodynamic microphone, made with standard CMOS technology. The monolithic integration of the mechanical sensor with the electronics using a standard CMOS process is respected in the design, whi...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Fundamental Technological Research Polish Academy of Sciences
2015-10-01
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| Series: | Archives of Acoustics |
| Subjects: | |
| Online Access: | https://acoustics.ippt.pan.pl/index.php/aa/article/view/1566 |
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