Evaluation methods of mechanical properties for low-k dielectrics
This review introduces the study of state-of-art methods for assessing the mechanical properties of insulating materials with low dielectric constant. The main features of measuring Young’s modulus of thin films insulating materials with low dielectric constant are determined by usage of Brillouin l...
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| Format: | Article |
| Language: | Russian |
| Published: |
MIREA - Russian Technological University
2021-06-01
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| Series: | Российский технологический журнал |
| Subjects: | |
| Online Access: | https://www.rtj-mirea.ru/jour/article/view/326 |
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