MATHEMATICAL MODELING OF THIN FILM GROWTH ON SUBSTRATES, ALLOWING THE CONSTRUCTION OF SOLUTIONS TO INVERSE PROBLEMS ARISING IN THE FRAMEWORK OF THE MODEL, BY COORDINATE TRANSFORMATION METHOD
The development of microelectronics, optoelectronics and other branches of science and technology contributes to progress in the field of film modeling
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
North-Caucasus Federal University
2022-08-01
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| Series: | Современная наука и инновации |
| Subjects: | |
| Online Access: | https://msi.elpub.ru/jour/article/view/79 |
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