Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices
This article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects of...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/6/663 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1839653283919036416 |
|---|---|
| author | Temesgen Bailie Workie Lingqin Zhang Junyao Shen Jianli Jiang Wenfeng Yao Quhuan Shen Jingfu Bao Ken-ya Hashimoto |
| author_facet | Temesgen Bailie Workie Lingqin Zhang Junyao Shen Jianli Jiang Wenfeng Yao Quhuan Shen Jingfu Bao Ken-ya Hashimoto |
| author_sort | Temesgen Bailie Workie |
| collection | DOAJ |
| description | This article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects of the pillar shape, material and geometric dimensions on achievable acoustic bandgap. To validate our concept, we fabricated SAW resonators and filters incorporating the proposed pillar-based PnC reflectors. The PnC-based reflector shows promising performance, even with smaller number of PnC arrays. In this regard, with a PnC array reflector consisting of 20 lattice periods, the SAW resonator exhibits a maximum bode-Q of about 1600, which can be considered to be a reasonably high value for SAW resonators on bulk 42° Y-X lithium tantalate (42° Y-X LiTaO<sub>3</sub>) substrate. Furthermore, we implemented SAW filters using pillar-based PnC reflectors, resulting in a minimum insertion loss of less than 3 dB and out-of-band attenuation exceeding 35 dB. The authors believe that there is still a long way to go in making it fit for mass production, especially due to issues related with the accuracy of fabrication. But, upon its successful implementation, this approach of using PnCs as SAW reflectors could lead to reducing the foot-print of SAW devices, particularly for SAW-based sensors and filters. |
| format | Article |
| id | doaj-art-52c9f90da167493cb6d7d6d9145fb8ce |
| institution | Matheson Library |
| issn | 2072-666X |
| language | English |
| publishDate | 2025-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-52c9f90da167493cb6d7d6d9145fb8ce2025-06-25T14:11:31ZengMDPI AGMicromachines2072-666X2025-05-0116666310.3390/mi16060663Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave DevicesTemesgen Bailie Workie0Lingqin Zhang1Junyao Shen2Jianli Jiang3Wenfeng Yao4Quhuan Shen5Jingfu Bao6Ken-ya Hashimoto7School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaTiantong Ruihong Technology Co., Ltd., No. 306, Haining 314499, ChinaSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaTiantong Ruihong Technology Co., Ltd., No. 306, Haining 314499, ChinaTiantong Ruihong Technology Co., Ltd., No. 306, Haining 314499, ChinaTiantong Ruihong Technology Co., Ltd., No. 306, Haining 314499, ChinaSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaSchool of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, ChinaThis article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects of the pillar shape, material and geometric dimensions on achievable acoustic bandgap. To validate our concept, we fabricated SAW resonators and filters incorporating the proposed pillar-based PnC reflectors. The PnC-based reflector shows promising performance, even with smaller number of PnC arrays. In this regard, with a PnC array reflector consisting of 20 lattice periods, the SAW resonator exhibits a maximum bode-Q of about 1600, which can be considered to be a reasonably high value for SAW resonators on bulk 42° Y-X lithium tantalate (42° Y-X LiTaO<sub>3</sub>) substrate. Furthermore, we implemented SAW filters using pillar-based PnC reflectors, resulting in a minimum insertion loss of less than 3 dB and out-of-band attenuation exceeding 35 dB. The authors believe that there is still a long way to go in making it fit for mass production, especially due to issues related with the accuracy of fabrication. But, upon its successful implementation, this approach of using PnCs as SAW reflectors could lead to reducing the foot-print of SAW devices, particularly for SAW-based sensors and filters.https://www.mdpi.com/2072-666X/16/6/663acoustic bandgapphononic crystalquality factorreflectorresonatorRF filter |
| spellingShingle | Temesgen Bailie Workie Lingqin Zhang Junyao Shen Jianli Jiang Wenfeng Yao Quhuan Shen Jingfu Bao Ken-ya Hashimoto Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices Micromachines acoustic bandgap phononic crystal quality factor reflector resonator RF filter |
| title | Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices |
| title_full | Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices |
| title_fullStr | Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices |
| title_full_unstemmed | Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices |
| title_short | Experimental Demonstration of Nanoscale Pillar Phononic Crystal-Based Reflector for Surface Acoustic Wave Devices |
| title_sort | experimental demonstration of nanoscale pillar phononic crystal based reflector for surface acoustic wave devices |
| topic | acoustic bandgap phononic crystal quality factor reflector resonator RF filter |
| url | https://www.mdpi.com/2072-666X/16/6/663 |
| work_keys_str_mv | AT temesgenbailieworkie experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices AT lingqinzhang experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices AT junyaoshen experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices AT jianlijiang experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices AT wenfengyao experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices AT quhuanshen experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices AT jingfubao experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices AT kenyahashimoto experimentaldemonstrationofnanoscalepillarphononiccrystalbasedreflectorforsurfaceacousticwavedevices |