Pilipenko, V. A., Solodukha, V. A., Kovalchuk, N. S., Solovjov, J. A., Shestovski, D. V., & Zhyhulin, D. V. (2022). Thermal Load Influence during the Formation of Al-Al Contacts on the Electrical Parameters of the Integrated Circuits with Aluminum-Polysilicon Contacts. Educational institution «Belarusian State University of Informatics and Radioelectronics».
Chicago Style (17th ed.) CitationPilipenko, V. A., V. A. Solodukha, N. S. Kovalchuk, J. A. Solovjov, D. V. Shestovski, and D. V. Zhyhulin. Thermal Load Influence During the Formation of Al-Al Contacts on the Electrical Parameters of the Integrated Circuits with Aluminum-Polysilicon Contacts. Educational institution «Belarusian State University of Informatics and Radioelectronics», 2022.
MLA (9th ed.) CitationPilipenko, V. A., et al. Thermal Load Influence During the Formation of Al-Al Contacts on the Electrical Parameters of the Integrated Circuits with Aluminum-Polysilicon Contacts. Educational institution «Belarusian State University of Informatics and Radioelectronics», 2022.