Optical characterization of chiral three-dimensionally periodic photonic crystals fabricated by temporally periodic physical vapor deposition on two-dimensionally periodic substrates
We fabricated chiral three-dimensionally (3D) periodic photonic crystals (PPCs) with nanoscale features by: first etching two different two-dimensionally (2D) periodic patterns in fused silica and silicon substrates, and then implementing temporally periodic physical vapor deposition (TP-PVD) whereb...
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Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2025-01-01
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Series: | Journal of Physics Communications |
Subjects: | |
Online Access: | https://doi.org/10.1088/2399-6528/ade7c9 |
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