Metrological-Characteristics-Based Calibration of Optical Areal Surface Measuring Instruments and Evaluation of Measurement Uncertainty for Surface Texture Measurements
ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unres...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
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| Series: | Instruments |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2410-390X/9/2/11 |
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| Summary: | ISO 25178 part 600:2019 and part 700:2022 introduce a calibration framework based on seven metrological characteristics (MCs) for calibrating optical areal surface measuring instruments. Among these, topography fidelity is a newly defined metrological characteristic that remains a critical yet unresolved challenge in instrument calibration. This paper proposes strategies to address topography fidelity, including a key criterion for selecting suitable instrument setups by comparing slope measurement capability with local surface slopes, as well as methods for investigating the field-of-view homogeneity and directional performance difference along the x- and y-axes. Furthermore, the uncertainty contribution of topography fidelity in surface topography measurements is analysed. The paper also determines the uncertainty associated with the remaining six MCs. Based on the proposed MC-based calibration approach and the corresponding uncertainty contributions, an overall measurement uncertainty model for <i>Sa</i> and <i>Sq</i> parameters is presented. Finally, uncertainty evaluations for <i>Sa</i> and <i>Sq</i> are demonstrated on a challenging surface, where topography fidelity plays a significant role in the measurement uncertainty evaluation. |
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| ISSN: | 2410-390X |