Visible to Near-Infrared Light Integrated Photonic Components on PECVD and LPCVD SiN Platform

Visible to Near-Infrared Light Integrated Photonic Components on PECVD and LPCVD SiN Platform

In this paper, we present our process design kits (PDKs) component performances for different wavelengths in the visible to near-infrared (VIS-NIR) range on Shanghai Industrial μTechnology Research Institute's (SITRI's) 200 mm silicon nitride (SiN) photonics platform...

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Bibliographic Details
Main Authors: Sen Yang, Zuoqin Ding, Xiao Li, Xiao Luo, Shuhua Zhai, Xiujun Zheng, Bo Wang, He Li, Zhuo Deng, Qianshi Wang, Sarp Kerman, Chang Chen
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Photonics Journal
Subjects:
Photonic integration
silicon nitride (SiN)
process design kits (PDKs)
visible to near-infrared (VIS-NIR)
Online Access:https://ieeexplore.ieee.org/document/10691934/
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https://ieeexplore.ieee.org/document/10691934/

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