Design a novel rectangular MPCVD reactor operated at 2.45 GHz for diamond growth: A simulation-based study

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Design a novel rectangular MPCVD reactor operated at 2.45 GHz for diamond growth: A simulation-based study

The electric field distribution within a microwave plasma chemical vapor deposition (MPCVD) reactor determines the quality of synthetic diamonds. In this study, we aimed to facilitate diamond deposition for various demands by designing a rectangular MPCVD reactor that can balance and regulate the el...

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Bibliographic Details
Main Authors:	Caijie Zhang, Kai Wang, Shixian Cai, Tingru Zhu, Jie Li, Zhiying Xu, Jinghui Wang, Kedong Wang, Guohui Wei, Xueqing Yan, Kun Zhu
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2025-06-01
Series:	AIP Advances
Online Access:	http://dx.doi.org/10.1063/5.0272947
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