High Density Multi-Channel Passively Aligned Optical Probe for Testing of Photonic Integrated Circuits
In this work we report the results of high density multi-channel optical multiprobes with pitches of 25 <inline-formula><tex-math notation="LaTeX">${\mu }\rm{m}$</tex-math></inline-formula> and 50 <inline-formula><tex-math notation=&qu...
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Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
IEEE
2021-01-01
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Series: | IEEE Photonics Journal |
Subjects: | |
Online Access: | https://ieeexplore.ieee.org/document/9296295/ |
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