Methods for Connecting a Concentrically Shaped Sensing Element of Microaccelerometers on Surface Acoustic Waves
Introduction. At present, acceleration sensors are in demand in various areas, from consumer electronics to space technology. Microaccelerometers exhibit the advantages of compact dimensions, light weight, and ease of integration with other components. The most common accelerometers are based on mic...
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| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Saint Petersburg Electrotechnical University "LETI"
2024-09-01
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| Series: | Известия высших учебных заведений России: Радиоэлектроника |
| Subjects: | |
| Online Access: | https://re.eltech.ru/jour/article/view/916 |
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