Methane Sensitivity of Pulsed Laser Treated SnO<sub>2</sub>(Ag) Nanocomposite Layers

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Methane Sensitivity of Pulsed Laser Treated SnO<sub>2</sub>(Ag) Nanocomposite Layers

This paper reports on the gas sensitivity of SnO2(Ag) layers, consequently formed by magnetron sputtering of Sn + Ag target, oxidation of Sn0.65Ag0.35 layers at the temperature of 650 °С within 30 min and modified by laser radiation pulses at energy density of W = 1.5–3.2 J/cm2. Using transmission e...

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Bibliographic Details
Main Authors:	S. L. Prakopyeu, P. I. Gaiduk
Format:	Article
Language:	Russian
Published:	Educational institution «Belarusian State University of Informatics and Radioelectronics» 2023-04-01
Series:	Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki
Subjects:	nanocomposite sno<sub>2</sub>(ag) layers magnetron sputtering pulsed laser annealing thermal oxidation gas sensitivity methane
Online Access:	https://doklady.bsuir.by/jour/article/view/3594
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