Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel Mechanisms
Flexure-based linear stages have become prevalent in precision engineering; however, most designs suffer from parasitic shifts that degrade positioning accuracy. Conventional solutions to mitigate these parasitic motions often compromise support stiffness, reduce motion range, and increase structura...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
|
| Series: | Machines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1702/13/6/530 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1839653417819045888 |
|---|---|
| author | Loïc Tissot-Daguette Célestin Vallat Marijn Nijenhuis Florent Cosandier Simon Henein |
| author_facet | Loïc Tissot-Daguette Célestin Vallat Marijn Nijenhuis Florent Cosandier Simon Henein |
| author_sort | Loïc Tissot-Daguette |
| collection | DOAJ |
| description | Flexure-based linear stages have become prevalent in precision engineering; however, most designs suffer from parasitic shifts that degrade positioning accuracy. Conventional solutions to mitigate these parasitic motions often compromise support stiffness, reduce motion range, and increase structural complexity. This study presents a novel family of flexure-based rectilinear-motion stages using coupled n-RRR planar parallel mechanisms, achieving extremely low parasitic shifts while addressing the forementioned limitations. Four design variants are selected and analyzed via Finite Element Method (FEM) simulations, evaluating parasitic shifts, stroke, and support stiffness. The most precise configuration, a 4-RRR rectilinear stage having kinematic chains coupled via two Watt linkages, exhibits a lateral shift smaller than 0.258 µm and an in-plane parasitic rotation smaller than 12.6 µrad over a 12 mm stroke. Experimental validation using a POM prototype confirms the high positioning precision and support stiffness properties. In addition, a silicon prototype incorporating thermally preloaded buckling beams is investigated to reduce its translational stiffness. Experimental results show a translational stiffness reduction of 98% in the monostable configuration and 112% in the bistable configuration (i.e., negative stiffness), without support stiffness reduction. These results highlight the potential of the proposed mechanisms for a wide range of precision applications, offering a scalable and high-accuracy solution for micro- and nano-positioning systems. |
| format | Article |
| id | doaj-art-14bb6ff8fce4442a9e4859ce90e00d2d |
| institution | Matheson Library |
| issn | 2075-1702 |
| language | English |
| publishDate | 2025-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Machines |
| spelling | doaj-art-14bb6ff8fce4442a9e4859ce90e00d2d2025-06-25T14:07:31ZengMDPI AGMachines2075-17022025-06-0113653010.3390/machines13060530Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel MechanismsLoïc Tissot-Daguette0Célestin Vallat1Marijn Nijenhuis2Florent Cosandier3Simon Henein4Micromechanical and Horological Design Laboratory (Instant-Lab), École Polytechnique Fédérale de Lausanne (EPFL), CH-2000 Neuchâtel, SwitzerlandMicromechanical and Horological Design Laboratory (Instant-Lab), École Polytechnique Fédérale de Lausanne (EPFL), CH-2000 Neuchâtel, SwitzerlandPrecision Engineering, University of Twente, 7522 NB Enschede, The NetherlandsMicromechanical and Horological Design Laboratory (Instant-Lab), École Polytechnique Fédérale de Lausanne (EPFL), CH-2000 Neuchâtel, SwitzerlandMicromechanical and Horological Design Laboratory (Instant-Lab), École Polytechnique Fédérale de Lausanne (EPFL), CH-2000 Neuchâtel, SwitzerlandFlexure-based linear stages have become prevalent in precision engineering; however, most designs suffer from parasitic shifts that degrade positioning accuracy. Conventional solutions to mitigate these parasitic motions often compromise support stiffness, reduce motion range, and increase structural complexity. This study presents a novel family of flexure-based rectilinear-motion stages using coupled n-RRR planar parallel mechanisms, achieving extremely low parasitic shifts while addressing the forementioned limitations. Four design variants are selected and analyzed via Finite Element Method (FEM) simulations, evaluating parasitic shifts, stroke, and support stiffness. The most precise configuration, a 4-RRR rectilinear stage having kinematic chains coupled via two Watt linkages, exhibits a lateral shift smaller than 0.258 µm and an in-plane parasitic rotation smaller than 12.6 µrad over a 12 mm stroke. Experimental validation using a POM prototype confirms the high positioning precision and support stiffness properties. In addition, a silicon prototype incorporating thermally preloaded buckling beams is investigated to reduce its translational stiffness. Experimental results show a translational stiffness reduction of 98% in the monostable configuration and 112% in the bistable configuration (i.e., negative stiffness), without support stiffness reduction. These results highlight the potential of the proposed mechanisms for a wide range of precision applications, offering a scalable and high-accuracy solution for micro- and nano-positioning systems.https://www.mdpi.com/2075-1702/13/6/530compliant mechanismsflexuresrectilinear translation stageparasitic shiftsupport stiffness |
| spellingShingle | Loïc Tissot-Daguette Célestin Vallat Marijn Nijenhuis Florent Cosandier Simon Henein Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel Mechanisms Machines compliant mechanisms flexures rectilinear translation stage parasitic shift support stiffness |
| title | Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel Mechanisms |
| title_full | Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel Mechanisms |
| title_fullStr | Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel Mechanisms |
| title_full_unstemmed | Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel Mechanisms |
| title_short | Near-Zero Parasitic Shift Rectilinear Flexure Stages Based on Coupled n-RRR Planar Parallel Mechanisms |
| title_sort | near zero parasitic shift rectilinear flexure stages based on coupled n rrr planar parallel mechanisms |
| topic | compliant mechanisms flexures rectilinear translation stage parasitic shift support stiffness |
| url | https://www.mdpi.com/2075-1702/13/6/530 |
| work_keys_str_mv | AT loictissotdaguette nearzeroparasiticshiftrectilinearflexurestagesbasedoncouplednrrrplanarparallelmechanisms AT celestinvallat nearzeroparasiticshiftrectilinearflexurestagesbasedoncouplednrrrplanarparallelmechanisms AT marijnnijenhuis nearzeroparasiticshiftrectilinearflexurestagesbasedoncouplednrrrplanarparallelmechanisms AT florentcosandier nearzeroparasiticshiftrectilinearflexurestagesbasedoncouplednrrrplanarparallelmechanisms AT simonhenein nearzeroparasiticshiftrectilinearflexurestagesbasedoncouplednrrrplanarparallelmechanisms |