Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry

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Computational Adaptive Optics for HAR Hybrid Trench Array Topography Measurement by Utilizing Coherence Scanning Interferometry

High aspect ratio (HAR) sample-induced aberrations seriously affect the topography measurement for the bottom of the microstructure by coherence scanning interferometry (CSI). Previous research proposed an aberration compensating method using deformable mirrors at the conjugate position of the pupil...

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Bibliographic Details
Main Authors:	Wenyou Qiao, Zhishan Gao, Qun Yuan, Lu Chen, Zhenyan Guo, Xiao Huo, Qian Wang
Format:	Article
Language:	English
Published:	MDPI AG 2025-06-01
Series:	Sensors
Subjects:	coherence scanning interferometry high aspect ratio sample-induced aberrations virtual phase filter aberration correction topography
Online Access:	https://www.mdpi.com/1424-8220/25/13/4085
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