Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication

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Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication

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Bibliographic Details
Main Authors:	Rémiens, D., Deresmes, D., Troadec, D., Costecalde, J.
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/37195
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