Implantation Damage Formation in GaN and ZnO

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Bibliographic Details
Main Authors: Lorenz, Katharina, Wendler, Elke
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2012
Subjects:
Online Access:https://www.intechopen.com/chapters/37193
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author Lorenz, Katharina
Wendler, Elke
author_facet Lorenz, Katharina
Wendler, Elke
author_sort Lorenz, Katharina
collection InTech Open eBooks
description None
doi_str_mv 10.5772/34751
first_indexed 2025-08-04T22:35:00Z
format Electronic
Book Chapter
fullrecord <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-37193</identifier><datestamp>2012-05-30</datestamp> <dc:title>Implantation Damage Formation in GaN and ZnO</dc:title> <dc:creator>Katharina Lorenz</dc:creator> <dc:creator>Elke Wendler</dc:creator> <dc:subject>Physical Sciences, Engineering and Technology</dc:subject> <dc:description>None</dc:description> <dc:publisher>IntechOpen</dc:publisher> <dc:date>2012-05-30</dc:date> <dc:type>Chapter, Part Of Book</dc:type> <dc:identifier>https://www.intechopen.com/chapters/37193</dc:identifier> <dc:identifier>doi:10.5772/34751</dc:identifier> <dc:language>en</dc:language> <dc:relation>ISBN:978-953-51-0634-0</dc:relation> <dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights> <dc:source>https://www.intechopen.com/books/1421 ; Ion Implantation</dc:source> </oai_dc:dc>
id InTech-37193
institution Matheson Library
isbn 978-953-51-0634-0
language English
last_indexed 2025-08-04T22:35:00Z
publishDate 2012
publisher IntechOpen
record_format intech
spelling InTech-371932012-05-30 Implantation Damage Formation in GaN and ZnO Katharina Lorenz Elke Wendler Physical Sciences, Engineering and Technology None IntechOpen 2012-05-30 Chapter, Part Of Book https://www.intechopen.com/chapters/37193 doi:10.5772/34751 en ISBN:978-953-51-0634-0 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/1421 ; Ion Implantation
spellingShingle Physical Sciences, Engineering and Technology
Lorenz, Katharina
Wendler, Elke
Implantation Damage Formation in GaN and ZnO
title Implantation Damage Formation in GaN and ZnO
title_full Implantation Damage Formation in GaN and ZnO
title_fullStr Implantation Damage Formation in GaN and ZnO
title_full_unstemmed Implantation Damage Formation in GaN and ZnO
title_short Implantation Damage Formation in GaN and ZnO
title_sort implantation damage formation in gan and zno
topic Physical Sciences, Engineering and Technology
url https://www.intechopen.com/chapters/37193
work_keys_str_mv AT lorenzkatharina implantationdamageformationinganandzno
AT wendlerelke implantationdamageformationinganandzno