High-Resolution Ion Implantation from keV to MeV

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High-Resolution Ion Implantation from keV to MeV

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Bibliographic Details
Main Authors:	Pezzagna, Sébastien, Meijer, Jan
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/37183
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