Particle Reduction at Metal Deposition Process in Wafer Fabrication
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| Main Authors: | , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/36402 |
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| _version_ | 1839566882462498816 |
|---|---|
| author | Aziz, Faieza Abdul Ahmad, Izham Hazizi Zulkifli, Norzima Yusuff, Rosnah Mohd. |
| author_facet | Aziz, Faieza Abdul Ahmad, Izham Hazizi Zulkifli, Norzima Yusuff, Rosnah Mohd. |
| author_sort | Aziz, Faieza Abdul |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/38239 |
| first_indexed | 2025-08-04T22:48:09Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-36402</identifier><datestamp>2012-05-16</datestamp>
<dc:title>Particle Reduction at Metal Deposition Process in Wafer Fabrication</dc:title>
<dc:creator>Faieza Abdul Aziz</dc:creator>
<dc:creator>Izham Hazizi Ahmad</dc:creator>
<dc:creator>Norzima Zulkifli</dc:creator>
<dc:creator>Rosnah Mohd. Yusuff</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-05-16</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/36402</dc:identifier>
<dc:identifier>doi:10.5772/38239</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-51-0530-5</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/1802 ; Manufacturing System</dc:source>
</oai_dc:dc> |
| id | InTech-36402 |
| institution | Matheson Library |
| isbn | 978-953-51-0530-5 |
| language | English |
| last_indexed | 2025-08-04T22:48:09Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-364022012-05-16 Particle Reduction at Metal Deposition Process in Wafer Fabrication Faieza Abdul Aziz Izham Hazizi Ahmad Norzima Zulkifli Rosnah Mohd. Yusuff Physical Sciences, Engineering and Technology None IntechOpen 2012-05-16 Chapter, Part Of Book https://www.intechopen.com/chapters/36402 doi:10.5772/38239 en ISBN:978-953-51-0530-5 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/1802 ; Manufacturing System |
| spellingShingle | Physical Sciences, Engineering and Technology Aziz, Faieza Abdul Ahmad, Izham Hazizi Zulkifli, Norzima Yusuff, Rosnah Mohd. Particle Reduction at Metal Deposition Process in Wafer Fabrication |
| title | Particle Reduction at Metal Deposition Process in Wafer Fabrication |
| title_full | Particle Reduction at Metal Deposition Process in Wafer Fabrication |
| title_fullStr | Particle Reduction at Metal Deposition Process in Wafer Fabrication |
| title_full_unstemmed | Particle Reduction at Metal Deposition Process in Wafer Fabrication |
| title_short | Particle Reduction at Metal Deposition Process in Wafer Fabrication |
| title_sort | particle reduction at metal deposition process in wafer fabrication |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/36402 |
| work_keys_str_mv | AT azizfaiezaabdul particlereductionatmetaldepositionprocessinwaferfabrication AT ahmadizhamhazizi particlereductionatmetaldepositionprocessinwaferfabrication AT zulkiflinorzima particlereductionatmetaldepositionprocessinwaferfabrication AT yusuffrosnahmohd particlereductionatmetaldepositionprocessinwaferfabrication |