Aziz, F. A., Ahmad, I. H., Zulkifli, N., & Yusuff, R. M. (2012). Particle Reduction at Metal Deposition Process in Wafer Fabrication. IntechOpen. https://doi.org/10.5772/38239
Chicago Style (17th ed.) CitationAziz, Faieza Abdul, Izham Hazizi Ahmad, Norzima Zulkifli, and Rosnah Mohd Yusuff. Particle Reduction at Metal Deposition Process in Wafer Fabrication. IntechOpen, 2012. https://doi.org/10.5772/38239.
MLA (9th ed.) CitationAziz, Faieza Abdul, et al. Particle Reduction at Metal Deposition Process in Wafer Fabrication. IntechOpen, 2012. https://doi.org/10.5772/38239.
Warning: These citations may not always be 100% accurate.