A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication
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| Main Author: | |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
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| Online Access: | https://www.intechopen.com/chapters/34479 |
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| _version_ | 1839565979869249536 |
|---|---|
| author | Shih, Hong |
| author_facet | Shih, Hong |
| author_sort | Shih, Hong |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/31992 |
| first_indexed | 2025-08-04T22:33:48Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-34479</identifier><datestamp>2012-03-30</datestamp>
<dc:title>A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication</dc:title>
<dc:creator>Hong Shih</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-03-30</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/34479</dc:identifier>
<dc:identifier>doi:10.5772/31992</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-51-0467-4</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/1380 ; Corrosion Resistance</dc:source>
</oai_dc:dc> |
| id | InTech-34479 |
| institution | Matheson Library |
| isbn | 978-953-51-0467-4 |
| language | English |
| last_indexed | 2025-08-04T22:33:48Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-344792012-03-30 A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication Hong Shih Physical Sciences, Engineering and Technology None IntechOpen 2012-03-30 Chapter, Part Of Book https://www.intechopen.com/chapters/34479 doi:10.5772/31992 en ISBN:978-953-51-0467-4 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/1380 ; Corrosion Resistance |
| spellingShingle | Physical Sciences, Engineering and Technology Shih, Hong A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication |
| title | A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication |
| title_full | A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication |
| title_fullStr | A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication |
| title_full_unstemmed | A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication |
| title_short | A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication |
| title_sort | systematic study and characterization of advanced corrosion resistance materials and their applications for plasma etching processes in semiconductor silicon wafer fabrication |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/34479 |
| work_keys_str_mv | AT shihhong asystematicstudyandcharacterizationofadvancedcorrosionresistancematerialsandtheirapplicationsforplasmaetchingprocessesinsemiconductorsiliconwaferfabrication AT shihhong systematicstudyandcharacterizationofadvancedcorrosionresistancematerialsandtheirapplicationsforplasmaetchingprocessesinsemiconductorsiliconwaferfabrication |