Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

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Bibliographic Details
Main Authors: Santra, T. S., Bhattacharyya, T. K., Patel, P., Tseng, F. G., Barik, T. K.
Format: Electronic Book Chapter
Language:English
Published: IntechOpen 2012
Subjects:
Physical Sciences, Engineering and Technology
Online Access:https://www.intechopen.com/chapters/33604
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