Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications
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| Main Authors: | , , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
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| Online Access: | https://www.intechopen.com/chapters/33604 |
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| _version_ | 1839564520503115776 |
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| author | Santra, T. S. Bhattacharyya, T. K. Patel, P. Tseng, F. G. Barik, T. K. |
| author_facet | Santra, T. S. Bhattacharyya, T. K. Patel, P. Tseng, F. G. Barik, T. K. |
| author_sort | Santra, T. S. |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/29671 |
| first_indexed | 2025-08-04T22:10:36Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-33604</identifier><datestamp>2012-03-28</datestamp>
<dc:title>Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications</dc:title>
<dc:creator>T. S. Santra</dc:creator>
<dc:creator>T. K. Bhattacharyya</dc:creator>
<dc:creator>P. Patel</dc:creator>
<dc:creator>F. G. Tseng</dc:creator>
<dc:creator>T. K. Barik</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-03-28</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/33604</dc:identifier>
<dc:identifier>doi:10.5772/29671</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-51-0306-6</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/853 ; Microelectromechanical Systems and Devices</dc:source>
</oai_dc:dc> |
| id | InTech-33604 |
| institution | Matheson Library |
| isbn | 978-953-51-0306-6 |
| language | English |
| last_indexed | 2025-08-04T22:10:36Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-336042012-03-28 Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications T. S. Santra T. K. Bhattacharyya P. Patel F. G. Tseng T. K. Barik Physical Sciences, Engineering and Technology None IntechOpen 2012-03-28 Chapter, Part Of Book https://www.intechopen.com/chapters/33604 doi:10.5772/29671 en ISBN:978-953-51-0306-6 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/853 ; Microelectromechanical Systems and Devices |
| spellingShingle | Physical Sciences, Engineering and Technology Santra, T. S. Bhattacharyya, T. K. Patel, P. Tseng, F. G. Barik, T. K. Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications |
| title | Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications |
| title_full | Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications |
| title_fullStr | Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications |
| title_full_unstemmed | Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications |
| title_short | Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications |
| title_sort | diamond diamond like carbon dlc and diamond like nanocomposite dln thin films for mems applications |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/33604 |
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