APA (7th ed.) Citation

Rahman, H. U. (2012). Plasma Based Dry Release of MEMS Devices. IntechOpen. https://doi.org/10.5772/28420

Chicago Style (17th ed.) Citation

Rahman, Hamood Ur. Plasma Based Dry Release of MEMS Devices. IntechOpen, 2012. https://doi.org/10.5772/28420.

MLA (9th ed.) Citation

Rahman, Hamood Ur. Plasma Based Dry Release of MEMS Devices. IntechOpen, 2012. https://doi.org/10.5772/28420.

Warning: These citations may not always be 100% accurate.