Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches

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Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches

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Bibliographic Details
Main Authors:	Marcelli, Romolo, Lucibello, Andrea, Angelis, Giorgio De, Proietti, Emanuela, Papaioannou, George, Bartolucci, Giancarlo, Giacomozzi, Flavio, Margesin, Benno
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/33596
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