Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches
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| Main Authors: | , , , , , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/33596 |
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| _version_ | 1839564518470975488 |
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| author | Marcelli, Romolo Lucibello, Andrea Angelis, Giorgio De Proietti, Emanuela Papaioannou, George Bartolucci, Giancarlo Giacomozzi, Flavio Margesin, Benno |
| author_facet | Marcelli, Romolo Lucibello, Andrea Angelis, Giorgio De Proietti, Emanuela Papaioannou, George Bartolucci, Giancarlo Giacomozzi, Flavio Margesin, Benno |
| author_sort | Marcelli, Romolo |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/29299 |
| first_indexed | 2025-08-04T22:10:34Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-33596</identifier><datestamp>2012-03-28</datestamp>
<dc:title>Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches</dc:title>
<dc:creator>Romolo Marcelli</dc:creator>
<dc:creator>Andrea Lucibello</dc:creator>
<dc:creator>Giorgio De Angelis</dc:creator>
<dc:creator>Emanuela Proietti</dc:creator>
<dc:creator>George Papaioannou</dc:creator>
<dc:creator>Giancarlo Bartolucci</dc:creator>
<dc:creator>Flavio Giacomozzi</dc:creator>
<dc:creator>Benno Margesin</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-03-28</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/33596</dc:identifier>
<dc:identifier>doi:10.5772/29299</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-51-0306-6</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/853 ; Microelectromechanical Systems and Devices</dc:source>
</oai_dc:dc> |
| id | InTech-33596 |
| institution | Matheson Library |
| isbn | 978-953-51-0306-6 |
| language | English |
| last_indexed | 2025-08-04T22:10:34Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-335962012-03-28 Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches Romolo Marcelli Andrea Lucibello Giorgio De Angelis Emanuela Proietti George Papaioannou Giancarlo Bartolucci Flavio Giacomozzi Benno Margesin Physical Sciences, Engineering and Technology None IntechOpen 2012-03-28 Chapter, Part Of Book https://www.intechopen.com/chapters/33596 doi:10.5772/29299 en ISBN:978-953-51-0306-6 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/853 ; Microelectromechanical Systems and Devices |
| spellingShingle | Physical Sciences, Engineering and Technology Marcelli, Romolo Lucibello, Andrea Angelis, Giorgio De Proietti, Emanuela Papaioannou, George Bartolucci, Giancarlo Giacomozzi, Flavio Margesin, Benno Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches |
| title | Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches |
| title_full | Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches |
| title_fullStr | Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches |
| title_full_unstemmed | Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches |
| title_short | Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches |
| title_sort | characterization and modeling of charging effects in dielectrics for the actuation of rf mems ohmic series and capacitive shunt switches |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/33596 |
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