Kidd, T. E. (2012). Dopant Driven Electron Beam Lithography. IntechOpen. https://doi.org/10.5772/34872
Chicago Style (17th ed.) CitationKidd, Timothy E. Dopant Driven Electron Beam Lithography. IntechOpen, 2012. https://doi.org/10.5772/34872.
MLA (9th ed.) CitationKidd, Timothy E. Dopant Driven Electron Beam Lithography. IntechOpen, 2012. https://doi.org/10.5772/34872.
Warning: These citations may not always be 100% accurate.