Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials

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Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials

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Bibliographic Details
Main Authors:	Homm, Gert, Petznick, Steve, Henning, Torsten, Klar, Peter J.
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/30352
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