Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials
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I tiakina i:
| Ngā kaituhi matua: | , , , |
|---|---|
| Hōputu: | Tāhiko Wāhanga pukapuka |
| Reo: | Ingarihi |
| I whakaputaina: |
IntechOpen
2012
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| Ngā marau: | |
| Urunga tuihono: | https://www.intechopen.com/chapters/30352 |
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| _version_ | 1839566792413937664 |
|---|---|
| author | Homm, Gert Petznick, Steve Henning, Torsten Klar, Peter J. |
| author_facet | Homm, Gert Petznick, Steve Henning, Torsten Klar, Peter J. |
| author_sort | Homm, Gert |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/33576 |
| first_indexed | 2025-08-04T22:46:43Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-30352</identifier><datestamp>2012-03-07</datestamp>
<dc:title>Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials</dc:title>
<dc:creator>Gert Homm</dc:creator>
<dc:creator>Steve Petznick</dc:creator>
<dc:creator>Torsten Henning</dc:creator>
<dc:creator>Peter J. Klar</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-03-07</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/30352</dc:identifier>
<dc:identifier>doi:10.5772/33576</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-51-0193-2</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/1790 ; Materials Science and Technology</dc:source>
</oai_dc:dc> |
| id | InTech-30352 |
| institution | Matheson Library |
| isbn | 978-953-51-0193-2 |
| language | English |
| last_indexed | 2025-08-04T22:46:43Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-303522012-03-07 Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials Gert Homm Steve Petznick Torsten Henning Peter J. Klar Physical Sciences, Engineering and Technology None IntechOpen 2012-03-07 Chapter, Part Of Book https://www.intechopen.com/chapters/30352 doi:10.5772/33576 en ISBN:978-953-51-0193-2 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/1790 ; Materials Science and Technology |
| spellingShingle | Physical Sciences, Engineering and Technology Homm, Gert Petznick, Steve Henning, Torsten Klar, Peter J. Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials |
| title | Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials |
| title_full | Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials |
| title_fullStr | Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials |
| title_full_unstemmed | Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials |
| title_short | Photolithography and Self-Aligned Subtractive and Additive Patterning of Conductive Materials |
| title_sort | photolithography and self aligned subtractive and additive patterning of conductive materials |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/30352 |
| work_keys_str_mv | AT hommgert photolithographyandselfalignedsubtractiveandadditivepatterningofconductivematerials AT petznicksteve photolithographyandselfalignedsubtractiveandadditivepatterningofconductivematerials AT henningtorsten photolithographyandselfalignedsubtractiveandadditivepatterningofconductivematerials AT klarpeterj photolithographyandselfalignedsubtractiveandadditivepatterningofconductivematerials |