Release Optimization of Suspended Membranes in MEMS

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Release Optimization of Suspended Membranes in MEMS

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Bibliographic Details
Main Authors:	Mendoza-Acevedo, Salvador, Reyes-Barranca, Mario Alfredo, Vázquez-Acosta, Edgar Norman, Moreno-Cadenas, José Antonio, González-Vidal, José Luis
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/27086
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