Release Optimization of Suspended Membranes in MEMS
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| Main Authors: | , , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/27086 |
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| _version_ | 1839564490285252608 |
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| author | Mendoza-Acevedo, Salvador Reyes-Barranca, Mario Alfredo Vázquez-Acosta, Edgar Norman Moreno-Cadenas, José Antonio González-Vidal, José Luis |
| author_facet | Mendoza-Acevedo, Salvador Reyes-Barranca, Mario Alfredo Vázquez-Acosta, Edgar Norman Moreno-Cadenas, José Antonio González-Vidal, José Luis |
| author_sort | Mendoza-Acevedo, Salvador |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/30909 |
| first_indexed | 2025-08-04T22:10:07Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-27086</identifier><datestamp>2012-02-03</datestamp>
<dc:title>Release Optimization of Suspended Membranes in MEMS</dc:title>
<dc:creator>Salvador Mendoza-Acevedo</dc:creator>
<dc:creator>Mario Alfredo Reyes-Barranca</dc:creator>
<dc:creator>Edgar Norman Vázquez-Acosta</dc:creator>
<dc:creator>José Antonio Moreno-Cadenas</dc:creator>
<dc:creator>José Luis González-Vidal</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-02-03</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/27086</dc:identifier>
<dc:identifier>doi:10.5772/30909</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-906-6</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/854 ; Micromachining Techniques for Fabrication of Micro and Nano Structures</dc:source>
</oai_dc:dc> |
| id | InTech-27086 |
| institution | Matheson Library |
| isbn | 978-953-307-906-6 |
| language | English |
| last_indexed | 2025-08-04T22:10:07Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-270862012-02-03 Release Optimization of Suspended Membranes in MEMS Salvador Mendoza-Acevedo Mario Alfredo Reyes-Barranca Edgar Norman Vázquez-Acosta José Antonio Moreno-Cadenas José Luis González-Vidal Physical Sciences, Engineering and Technology None IntechOpen 2012-02-03 Chapter, Part Of Book https://www.intechopen.com/chapters/27086 doi:10.5772/30909 en ISBN:978-953-307-906-6 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/854 ; Micromachining Techniques for Fabrication of Micro and Nano Structures |
| spellingShingle | Physical Sciences, Engineering and Technology Mendoza-Acevedo, Salvador Reyes-Barranca, Mario Alfredo Vázquez-Acosta, Edgar Norman Moreno-Cadenas, José Antonio González-Vidal, José Luis Release Optimization of Suspended Membranes in MEMS |
| title | Release Optimization of Suspended Membranes in MEMS |
| title_full | Release Optimization of Suspended Membranes in MEMS |
| title_fullStr | Release Optimization of Suspended Membranes in MEMS |
| title_full_unstemmed | Release Optimization of Suspended Membranes in MEMS |
| title_short | Release Optimization of Suspended Membranes in MEMS |
| title_sort | release optimization of suspended membranes in mems |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/27086 |
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