Focused Ion Beam Based Three-Dimensional Nano-Machining

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Focused Ion Beam Based Three-Dimensional Nano-Machining

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Bibliographic Details
Main Authors:	Venugopal, Gunasekaran, Saini, Shrikant, Kim, Sang-Jae
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/27079
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