Development of 2" AlN Substrates Using SiC Seeds

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Development of 2" AlN Substrates Using SiC Seeds

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Bibliographic Details
Main Authors:	Avdeev, O.V., Chemekova, T.Yu., Mokhov, E.N., Nagalyuk, S.S., Helava, H., Ramm, M.G., Segal, A.S., Zhmakin, A.I., Makarov, Yu.N.
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/26208
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