Development of 2" AlN Substrates Using SiC Seeds
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| Main Authors: | , , , , , , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/26208 |
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| _version_ | 1839564440666636288 |
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| author | Avdeev, O.V. Chemekova, T.Yu. Mokhov, E.N. Nagalyuk, S.S. Helava, H. Ramm, M.G. Segal, A.S. Zhmakin, A.I. Makarov, Yu.N. |
| author_facet | Avdeev, O.V. Chemekova, T.Yu. Mokhov, E.N. Nagalyuk, S.S. Helava, H. Ramm, M.G. Segal, A.S. Zhmakin, A.I. Makarov, Yu.N. |
| author_sort | Avdeev, O.V. |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/29853 |
| first_indexed | 2025-08-04T22:09:20Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-26208</identifier><datestamp>2012-01-13</datestamp>
<dc:title>Development of 2" AlN Substrates Using SiC Seeds</dc:title>
<dc:creator>O.V. Avdeev</dc:creator>
<dc:creator>T.Yu. Chemekova</dc:creator>
<dc:creator>E.N. Mokhov</dc:creator>
<dc:creator>S.S. Nagalyuk</dc:creator>
<dc:creator>H. Helava</dc:creator>
<dc:creator>M.G. Ramm</dc:creator>
<dc:creator>A.S. Segal</dc:creator>
<dc:creator>A.I. Zhmakin</dc:creator>
<dc:creator>Yu.N. Makarov</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-01-13</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/26208</dc:identifier>
<dc:identifier>doi:10.5772/29853</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-610-2</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/837 ; Modern Aspects of Bulk Crystal and Thin Film Preparation</dc:source>
</oai_dc:dc> |
| id | InTech-26208 |
| institution | Matheson Library |
| isbn | 978-953-307-610-2 |
| language | English |
| last_indexed | 2025-08-04T22:09:20Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-262082012-01-13 Development of 2" AlN Substrates Using SiC Seeds O.V. Avdeev T.Yu. Chemekova E.N. Mokhov S.S. Nagalyuk H. Helava M.G. Ramm A.S. Segal A.I. Zhmakin Yu.N. Makarov Physical Sciences, Engineering and Technology None IntechOpen 2012-01-13 Chapter, Part Of Book https://www.intechopen.com/chapters/26208 doi:10.5772/29853 en ISBN:978-953-307-610-2 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/837 ; Modern Aspects of Bulk Crystal and Thin Film Preparation |
| spellingShingle | Physical Sciences, Engineering and Technology Avdeev, O.V. Chemekova, T.Yu. Mokhov, E.N. Nagalyuk, S.S. Helava, H. Ramm, M.G. Segal, A.S. Zhmakin, A.I. Makarov, Yu.N. Development of 2" AlN Substrates Using SiC Seeds |
| title | Development of 2" AlN Substrates Using SiC Seeds |
| title_full | Development of 2" AlN Substrates Using SiC Seeds |
| title_fullStr | Development of 2" AlN Substrates Using SiC Seeds |
| title_full_unstemmed | Development of 2" AlN Substrates Using SiC Seeds |
| title_short | Development of 2" AlN Substrates Using SiC Seeds |
| title_sort | development of 2 aln substrates using sic seeds |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/26208 |
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