Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

QR Code

Defect Engineering During Czochralski Crystal Growth and Silicon Wafer Manufacturing

None

Saved in:

Bibliographic Details
Main Authors:	Válek, Lukáš, Šik, Jan
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/26201
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Surface-Functionalized Porous Silicon Wafers: Synthesis and Applications
by: D., Fahlman Bradley, et al.
Published: (2012)

Infrared Spectroscopic Ellipsometry for Ion-Implanted Silicon Wafers
by: Li, et al.
Published: (2011)

Quantitative characterization of topographic defects of semiconductor silicon wafers
by: S. F. Sianko, et al.
Published: (2019-06-01)

Deep learning driven silicon wafer defect segmentation and classification
by: Rohan Ingle, et al.
Published: (2025-06-01)

Oriented Lateral Growth and Defects in Polycrystalline-Silicon Thin Films on Glass Substrates
by: Kitahara, Kuninori, et al.
Published: (2012)

Protein Crystal Growth
by: Nederlof, Igor, et al.
Published: (2012)

A Systematic Study and Characterization of Advanced Corrosion Resistance Materials and Their Applications for Plasma Etching Processes in Semiconductor Silicon Wafer Fabrication
by: Shih, Hong
Published: (2012)

Defect Detection and Error Source Tracing in Laser Marking of Silicon Wafers with Machine Learning
by: Hsiao-Chung Wang, et al.
Published: (2025-06-01)

Particle Reduction at Metal Deposition Process in Wafer Fabrication
by: Aziz, Faieza Abdul, et al.
Published: (2012)

Defect Related Luminescence in Silicon Dioxide Network: A Review
by: Salh, Roushdey
Published: (2011)

Study of Liquid Crystal on Silicon Displays for Their Application in Digital Holography
by: Lizana, Angel, et al.
Published: (2011)

A Wafer-Scale Rapid Electronic Systems Prototyping Platform
by: André, Walder, et al.
Published: (2011)

Growth and Characterization of Single Crystals of Potassium Sodium Niobate by Solid State Crystal Growth
by: Benčan, Andreja, et al.
Published: (2011)

Crystal Growth: Substructure and Recrystallization
by: Glebovsky, Vadim
Published: (2012)

Pattern Selection in Crystal Growth
by: Wołczyński, Waldemar
Published: (2012)

Monte Carlo Simulations on Defects in Hard-Sphere Crystals Under Gravity
by: Mori, Atsushi
Published: (2011)

HYDROTHERMAL DEPOSITION OF ZnO NANOSTRUCTURES ON SILICON WAFERS
by: E. B. Chubenko
Published: (2019-06-01)

INFLUENCE OF SILICON WAFER CRYSTALLOGRAPHIC ORIENTATION ON ANODIZATION MECHANISM
by: N. L. Grevtsov, et al.
Published: (2020-03-01)

METHOD AND CONTROL SET-UP OF SILICON WAFER FLATNESS
by: V. A. Pilipenko, et al.
Published: (2015-04-01)

The Influence of Atmosphere on Oxides Crystal Growth
by: Asadian, Morteza
Published: (2012)

EQUIPMENT FOR NONDESTRUCTIVE TESTING OF SILICON WAFERS SUBMICRON TOPOLOGY DURING THE FABRICATION OF INTEGRATED CIRCUITS
by: S. A. Chizhik, et al.
Published: (2015-03-01)

The Selective Growth of Silicon Nanowires and Their Optical Activation
by: Ren, Lingling, et al.
Published: (2011)

Application of Electron Beam Treatment in Polycrystalline Silicon Films Manufacture for Solar Cell
by: Fu, L.
Published: (2011)

Protein Crystal Growth Under High Pressure
by: Suzuki, Yoshihisa
Published: (2012)

STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL
by: R. I. Vorobey, et al.
Published: (2015-03-01)

STUDY OF SILICON-INSULATOR STRUCTURE DEFECTS BASED ON ANALYSIS OF A SPATIAL DISTRIBUTION OF A SEMICONDUCTOR WAFERS’ SURFACE POTENTIAL
by: R. I. Vorobey, et al.
Published: (2015-03-01)

Growth of 4‑Inch InP Single-Crystal Wafer Using the VGF-VB Technique
by: Hua Wei, et al.
Published: (2025-06-01)

Identification and Kinetic Properties of the Photosensitive Impurities and Defects in High-Purity Semi-Insulating Silicon Carbide
by: Savchenko, D. V., et al.
Published: (2011)

Novel Challenges in Crystal Engineering: Polymorphs and New Crystal Forms of Active Pharmaceutical Ingredients
by: André, Vânia, et al.
Published: (2011)

Simulation of silicon wafers heating during rapid thermal processing using “UBTO 1801” unit
by: J. A. Solovjov, et al.
Published: (2020-11-01)

Integrating Micro-Photonic Systems and MOEMS into Standard Silicon CMOS Integrated Circuitry
by: Snyman, Lukas W.
Published: (2011)

New Class of Apparatus for Crystal Growth from Melt
by: Janićijević, Aco, et al.
Published: (2012)

Growth and Characterization of Doped CaF2 Crystals
by: Nicoara, Irina, et al.
Published: (2012)

Growth of Organic Nonlinear Optical Crystals from Solution
by: Joseph, A. Antony, et al.
Published: (2012)

Bulk Growth and Characterization of SiC Single Crystal
by: Ning, Lina, et al.
Published: (2011)

Novel Deposition Technique for Fast Growth of Hydrogenated Microcrystalline Silicon Thin-Film for Thin-Film Silicon Solar Cells
by: Saha, Jhantu Kumar, et al.
Published: (2011)

Crystal Growth and Stoichiometry of Strongly Correlated Intermetallic Cerium Compounds
by: Prokofiev, Andrey, et al.
Published: (2012)

Crystal Growth Study of Nano-Zeolite by Atomic Force Microscopy
by: Aghabozorg, H. R., et al.
Published: (2012)

Simulation of CaCO3 Crystal Growth in Multiphase Reaction
by: Gierycz, Pawel
Published: (2012)

Interfacial Mass Transfer and Morphological Instability of Oxide Crystal Growth
by: Pan, Xiuhong, et al.
Published: (2011)