Simulation-Based Modular Scheduling System of Semiconductor Manufacturing

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Simulation-Based Modular Scheduling System of Semiconductor Manufacturing

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Bibliographic Details
Main Authors:	Li, Li, Yumin, Qiao Fei Ma, Kai, Ye
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/25893
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