Allain, J. (2011). Irradiation Effects on EUV Nanolithography Collector Mirrors. IntechOpen. https://doi.org/10.5772/24316
Chicago Style (17th ed.) CitationAllain, J.P. Irradiation Effects on EUV Nanolithography Collector Mirrors. IntechOpen, 2011. https://doi.org/10.5772/24316.
MLA (9th ed.) CitationAllain, J.P. Irradiation Effects on EUV Nanolithography Collector Mirrors. IntechOpen, 2011. https://doi.org/10.5772/24316.
Warning: These citations may not always be 100% accurate.